To all,
        Thank you for all your replies. I omitted the word optically. I was
looking for
        equipment that can measure thick films more than 30um to 100um
optically. I would
        once again appreciate any directions I can have on it.

        I am looking for equipments that can measure thick resist more than 30
um
        upto 100um or more on silicon wafers. I would appreciate any directions
I
        can have on it.


Regards,

Padmaja

Padmaja Ramadas                                         (972)-927-1108 (w)
Texas Instruments Incorporated                  (972)-995-8787(fax)
Microcomponents Technology Center               ramadas@ti.com
Semiconductor Research & Development
P.O. Box 655012
M/S 945
Dallas, Texas  75265


> -----Original Message-----
> From: Jun-Bo Yoon [SMTP:jbyoon@eeinfo.kaist.ac.kr]
> Sent: Sunday, January 24, 1999 6:20 PM
> To:   Ramadas, Padmaja; mems-cc@ISI.EDU; MEMS@ISI.EDU
> Subject:      Re: Equipment for measuring thick polymers
>
>
> Dear colleague,
>
>  I am using Mitutoyo Digital Indicator with Stand. So, first, I measure
> the wafer thickness then I obtain film thickness after measuring total
> thickness.
>
>  The system measures 0~2mm with 0.001mm resolution and 0.003mm
> accuracy. It consist of ID-C Digimatic Indicator (Part # 543-250) and Dial
> Gage Stands (7002). The price of the system is about 500 US$.
>
>  I hope this will help you...
>
> At 01:20 PM 99-01-14 -0600, Ramadas, Padmaja wrote:
> >I am looking for equipments that can measure thick resist more than 30 um
> upto 100um or more on silicon wafers. I would appreciate any directions I
> can have on it.
> >
> >Thank you,
> >
> >Regards,
> >
> >Padmaja
> >
> >
> >
> >
> >
>
> Jun-Bo Yoon
>
> Ph.D. student
> Dept. of Electrical Engineering, KAIST
> 373-1 Kusong-dong, Yusong-gu,
> Taejon 305-701, Korea
> Tel: +82-42-869-8524
> Fax: +82-42-869-8530
> Email: jbyoon@eeinfo.kaist.ac.kr
> WWW: http://mirine.kaist.ac.kr