durusmail: mems-talk: RE: Thick Resists for Au plating
RE: Thick Resists for Au plating
1999-02-10
1999-02-19
RE: Thick Resists for Au plating
Yohannes
1999-02-19
>
>AZ 4620 is regularly used for Cu and Au plating in 25 micron application.
>> ----------

I have tried AZ4620 with a basic (pH 10) gold sulfite solution.  The resist
is attacked by the high pH solution.  If you plan to use AZ4620, I recomend
plating at a slightly lower pH... 8.5 or so.  AZ4620 can be easily removed
using a solvent or even full strength developing solution.

Regards,
Yohannes


reply