Surface Technology Systems manufacturers a Xenon delivery system.  Contact
us @ your convenience in Redwood City CA.  Phone 650 569 3655 x16.
Best regards,
Greg Ortiz

----------
> From: Mark Bachman 
> To: MEMS@ISI.EDU
> Subject: Supplier of XeF2 etching equipment?
> Date: Friday, February 19, 1999 6:24 PM
>
> Dear MEMS group,
>
> We would like to do some Xenon Diflouride etching on silicon. Before we
> build an etching station from scratch, I wonder if anyone knows of a
> manufacturer or vendor who supplies such a station.
>
> Any help will be appreciated.
>
> -Mark Bachman.
>
> --------------------------------------------
> Mark Bachman, Ph.D.
> mbachman@uci.edu / 949-824-6421 (-3732 fax)
> Research Physicist, Microsystems Engineering
> University of California at Irvine
>
>
>