How deep, how wide, how long, how many? >hi, Everybody: > I am trying to etch microchannel on glass (borosilicate glass,7740), >but, lack of the support to do LPCVD poly-silicon on glass, the only >subsitution >I know is Cr/Au, but I really don't know if it can resist deept etching >for me, >about 320 mu m... > Besides, I don't know if amorphous silicon can resist to HF etching, >I want to do deep etching, so I will use HF about 48% solution... > Any suggestions will be granted! I will appreciate.. > > Thanks a lot, > Sincerely > >Jerry Lee >Insitute of Applied Mechanics >email: r6543023@gauss.iam.ntu.edu.tw / iamjhlee@email.com > >