Hi, John: In fact, my microchannel is quite big... many undercut (isotropic) need 400 mu deep (R), 700~800mu wide (2R) for electrophoresis... If any experiences to be share, I will appreciate it! Thanks! Sincerely, ____________________________________________ Jerry Lee (Jia-Hong Lee) Insitute of Applied Mechanics, National Taiwan University Taipei, Taiwan, ROC e-mail: iamjhlee@email.com r6543023@gauss.iam.ntu.edu.tw "Try then error is better than no try" >How deep, how wide, how long, how many? >>I know is Cr/Au, but I really don't know if it can resist deept etching >>about 320 mu m...