durusmail: mems-talk: Re: Thick Resists for Au plating
Re: Thick Resists for Au plating
1999-02-10
1999-03-01
Re: Thick Resists for Au plating
Mark Wendman
1999-03-01
If I am not mistaken SU-8 is removable in epoxy resin strippers. I do not
know
more specifics.

Mark Wendman
mw3eng@gte.net

----------
> From: Todd Green 
> To: MEMS@ISI.EDU
> Subject: Thick Resists for Au plating
> Date: Tuesday, February 09, 1999 10:35 AM
>
> Hi,
>
> I'm looking for resists that can be spun up to around 25 microns and have
> good compatability with alkaline (pH=10) gold sulfite plating bath. We
are
> using SJR 3740 but are interested in other alternatives. We tried SU-8
> but can't find anything to remove it. Is there anything else available?
>
> Thanks,
>
> Todd Green
>
>


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