John,

Depending on whether you want to do the measurement calculations yourself
from an interferometric image or if you wish to use an instrument which
does it for you, you have 2 different answers. If a simple interferometric
fringe image is sufficient - Nikon Optiphot type incident light microscopes
are adaptable using Nikon optics and lenses. If you wish to use an
instrument which does all the work, Wyko (now a division of Veeco
Instruments) makes phase imaging  microscopes (i do not know the exact
phrase by which they are called). The instrument does not however work that
well in imaging the top surface of transparent films (as in CMP'd glass on
silicon).

I have used the Nikon setup for quite some time although I did not assemble
nor purchase the configuration. I worked for 8+ years on micromachining of
Atomic Force microscope probes, and the Nikon was wonderful to help
determine bending of the cantilevers.

By the way I am a graduate of CMU physics '81. How's life in Hammerschlag?

Mark Wendman
mw3eng@gte.net

----------
> From: John Neumann 
> To: MEMS@ISI.EDU
> Subject: interferometers
> Date: Thursday, February 11, 1999 9:20 AM
>
> Does anyone know if there is a type of interferometer that would
> interface to an existing microscope? We have a porbe station we
> like, and it would be useful to measure z-direction vibrations at
> various points on the structures we look at.
>
> Thanks,
> --
>
> %%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%
>
> Dr. John Neumann
> Postdoctoral Researcher, ECE Dept.
> Micro-electro-mechanical Systems (MEMS)
> 1209 Hamerschlag Hall
> Carnegie Mellon University
> Pittsburgh, PA 15213-3890
>
> jneumann@ece.cmu.edu
> phone: (412) 268-4404
> FAX: (412) 268-2860
>