durusmail: mems-talk: ALIGNMENT OF FAR-APART WAFERS
ALIGNMENT OF FAR-APART WAFERS
ALIGNMENT OF FAR-APART WAFERS
Alexander Shenderov
1999-03-03
Dear all:

I have a problem aligning two glass substrates with a pattern of
transparent electrodes on each.  The wafers need to be  arranged
face-to-face through a gasket 25 to 100 microns thick (obviously, with
holes in it).  The electrode arrays on the opposing sides of the
resultant chamber need to oppose each other to within few microns
(optimally, a micron).

Trouble is, you can not see the electrodes on both sides at the same
time - they are waaay too far apart.

Any suggestions will be highly appreciated.  In particular, does anybody
know a manufacturer who could do such alignment?  I am in RTP, NC - if
you know several locations.

Thank you all.

Alex


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