durusmail: mems-talk: looking for cleaning solution
looking for cleaning solution
1999-03-05
looking for cleaning solution
lsjang
1999-03-05
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Hi,

I am working on micropump now. The pump was made by silicon and pyrex =
and bonded on alumium base by crystal bond. Since the inside of the pump =
got dirty, I am looking for a kind of cleaning solution to remove =
organic and dust from the surface of silicon and pyrex, but not to =
dissolve crystal bond, pyrex and metal. Could you give me some opinions? =
Thanks a lot!
=20
Ling-Sheng

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Hi,
 
I am working on micropump now. The=20 pump was made by silicon and pyrex and bonded on alumium base by crystal = bond.=20 Since the inside of the pump got dirty, I am looking for a kind of = cleaning=20 solution to remove organic and dust from the surface of silicon and = pyrex, but=20 not to dissolve crystal bond, pyrex and metal. Could you give me some = opinions?=20 Thanks a lot!
 
Ling-Sheng
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