I have done some work using parylene as an anti-stiction agent.  In order to
probe through the coating I have to use very thin (75A) coatings which are not
adequately reproducible.

Does anyone have experience with selectively removing parylene?

Sincerely,
Maurice Karpman
Senior Engineer
Analog Devices, Inc
21 Osborn St
Cambridge, MA 02139
617-761-7201
maurice.karpman@analog.com