durusmail: mems-talk: Re: In-situ Boron doping of polysilicon
Re: In-situ Boron doping of polysilicon
1999-03-05
Re: In-situ Boron doping of polysilicon
Lynn Rathbun
1999-03-05
3" square silicon...

We can do doped poly.

rsvp to   infante@cnf.cornell.edu


>This is a multi-part message in MIME format.
>--------------2A219C626459F18EFAE28638
>Content-Type: text/plain; charset=us-ascii
>Content-Transfer-Encoding: 7bit
>
>Does anybody know a source for CVD of in-situ boron doped polysilicon?
>I want to do this on 3" squre substrate.
>
>Please let me know.
>
>Thanks
>
>Matt
>

>


*****************************************************
Dr. Lynn Rathbun, User Program Manager   Voice (607)-255-2329 ext 110
Cornell Nanofabrication Facility                    FAX(607)-255-8601
Knight Laboratory-Cornell University    email   Rathbun@cnf.cornell.edu
Ithaca, New York 14853                      http://www.cnf.cornell.edu/
Webmaster @ Christian World Adoption  http://www.cwa.org/
Webmaster @ Joint Council on International Children's Services www.jcics.org
(any opinions or representations of fact re: adoption are my own however)
*****************************************************


reply