durusmail: mems-talk: Re: Grating mask
Re: Grating mask
1999-03-03
1999-03-04
1999-03-03
Re: Grating mask
Kai Hiltmann
1999-03-03
Hua-Tang,

you might ask Heidenhain company

http://www.heidenhain.com

In Europe, the are one of the best manufacturers of gratings. As far
as I know, 10 years ago, the were developing interference gratings
with smallest pitches.

> Hi,
>     This is my first message in the group discussion.  How's
>     everybody?
>
> I have some questions about the grating mask, which is a mask whose
> pattern is containing at least 10,000 lines/mm. Does anyone have
> information about who can fabricate this kind of mask? What is the
> highest frequency can be made and how much does it cost?  Is it
> possible to have cross lines or circular dots instead? Thank you for
> your information.
>
Yours sincerely, Kai Hiltmann

mailto:Kai.Hiltmann@IMIT.Uni-Stuttgart.de    http://www.IMIT.Uni-Stuttgart.de
K. Hiltmann
c.o. HSG-IMIT
Sensorics Section
W.-Schickard-Str. 10
D-78052 Villingen-Schwenningen

Phone ++49-7721-943-132
Fax   ++49-7721-943-210


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