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MEMS Discussion Group,
 =20

  I am in search of a prototype manufacturing source for drilling =
micro-vias on glass wafers.  Laser drilling or sand blasting seems like =
good candidates.  I need holes of diameter of about 150 micrometers on a =
7740 glass wafer.  Any help would be greatly appreciated.


Chia-Lun Tsai, Ph.D.
   Research Scientist
   Integrated Sensing Systems, Inc.
   387 Airport Industrial Dr.=20
   Ypsilanti, MI 48198
   Phone: (734) 547-9896, Ext.115
   Fax: (734) 547-9964
   Email: chialun@mems-issys.com
   http://www.mems-issys.com/


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MEMS Discussion Group,
  
 
  I am in search of a prototype manufacturing =
source for=20
drilling micro-vias on glass wafers.  Laser=20
drilling or sand blasting seems like good candidates.  I need holes =
of=20
diameter of about 150 micrometers on a 7740 glass wafer.  Any help =
would be=20
greatly appreciated.
 
 
Chia-Lun Tsai, =
Ph.D.
  =20
Research Scientist
   Integrated Sensing Systems,=20
Inc.
   387 Airport Industrial Dr. 
   =
Ypsilanti, MI=20
48198
   Phone: (734) 547-9896, Ext.115
   =
Fax: (734)=20
547-9964
   Email: chialun@mems-issys.com
&nbs=
p; =20
http://www.mems-issys.com/
 


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