Hi,

I've never heard of anisotropic etching of glass although perhaps some
kind of dry etching would be possible. To the rest of the MEMS group,
I'd be very interested in the answer also!

Cheers.
--
Yit-shun Leung Ki
Graduate Student in Microfluidics
_______________________________________________________________
Institute of Microsystems (IMS)
Dept. of Microengineering,
Batîment BM,
Swiss Federal Inst. of Tech. (EPFL),    TEL: +41 21 693 7818
CH-1015 Lausanne                        FAX: +41 21 693 5950
Switzerland                             URL: dmtwww.epfl.ch/ims