Hello everybody, I am interested in using XeF2 to etch silicon on a CMOS chip, and would like to know which MOSIS processes support an open layer of exposed Si substrate for this etching. More generally, I'd really like to get detailed cross-sections and layer thicknesses for CMOS processes available through MOSIS. Does anyone know where this information might be available? Thanks! Patrick Bedell jpb@mrsc.ucsf.edu (415) 476 1910