Dear MEMS community,

I am looking for a biocompatible material, which is deposited easily,
by spin-coating for instance, and offers good durability for
microfluidic devices.

1. Could anyone tell me what materials are considered to be
biocompatible?

2. Parylene C is often reported to be one of them, and it is said to be
vapour deposited.  Does this mean, it is deposited by Chemical Vapour
Deposition?

3. Are the following biocompatible: glass, silicone rubbers, PMMA?


Thank you very much for your time.


Get Your Private, Free Email at http://www.hotmail.com