durusmail: mems-talk: Re: Micro-via on glass wafer
Re: Micro-via on glass wafer
1999-03-11
1999-03-11
1999-03-11
1999-03-15
1999-03-12
Re: Micro-via on glass wafer
Robert Okojie
1999-03-11
Chia-Lun,

Try Accu-Tech Laser Processing.

1175 Linda Vista Drive
San Marcos, CA 92069

(760) 744-6692


On Mar 10, 10:30, Chialun wrote:
> Subject: Micro-via on glass wafer
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> MEMS Discussion Group,
>  =20
>
>   I am in search of a prototype manufacturing source for drilling =
> micro-vias on glass wafers.  Laser drilling or sand blasting seems like =
> good candidates.  I need holes of diameter of about 150 micrometers on a =
> 7740 glass wafer.  Any help would be greatly appreciated.
>
>
> Chia-Lun Tsai, Ph.D.
>    Research Scientist
>    Integrated Sensing Systems, Inc.
>    387 Airport Industrial Dr.=20
>    Ypsilanti, MI 48198
>    Phone: (734) 547-9896, Ext.115
>    Fax: (734) 547-9964
>    Email: chialun@mems-issys.com
>    http://www.mems-issys.com/
>
>
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MEMS Discussion Group,
>
 
 
>
  I am in search of a prototype manufacturing = > source for=20 > drilling micro-vias on glass wafers.  L color=3D#000000>aser=20 > drilling or sand blasting seems like good candidates.  I need holes = > of=20 > diameter of about 150 micrometers on a 7740 glass wafer.  Any help = > would be=20 > greatly appreciated.
 
>
 
>
Chia-Lun Tsai, = > Ph.D.
  =20 > Research Scientist
   Integrated Sensing Systems,=20 > Inc.
   387 Airport Industrial Dr.
   = > Ypsilanti, MI=20 > 48198
   Phone: (734) 547-9896, Ext.115
   = > Fax: (734)=20 > 547-9964
   Email: href=3D"mailto:chialun@mems-issys.com">chialun@mems-issys.com
&nbs= > p; =20 > href=3D"http://www.mems-issys.com/">http://www.mems-issys.com/
ONT> 
> > ------=_NextPart_000_00B4_01BE6AE0.FC91E170-- > > >-- End of excerpt from Chialun -- Robert S. Okojie, Ph.D. Senior Engineer Ford Microelectronics 9965 Federal Drive, Colorado Springs, CO 80921-3698 Phone:(719)528-7727; Fax: (719)528-7529 "The frontier of knowledge has no boundary. Paradigms rise and fall"
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