You could use normal drill bits for these holes (the through put per drill is
very low though).  lunzer makes drills starting from 2-3 mil (50-75
microns) in
diameter.

Hope this helps

Shekhar

At 10:30 AM 3/10/99 -0500, you wrote:
>
> This is a multi-part message in MIME format.
>
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>
> MEMS Discussion Group,
> =20
>
> I am in search of a prototype manufacturing source for drilling =
> micro-vias on glass wafers. Laser drilling or sand blasting seems like =
> good candidates. I need holes of diameter of about 150 micrometers on a =
> 7740 glass wafer. Any help would be greatly appreciated.
>
>
> Chia-Lun Tsai, Ph.D.
> Research Scientist
> Integrated Sensing Systems, Inc.
> 387 Airport Industrial Dr.=20
> Ypsilanti, MI 48198
> Phone: (734) 547-9896, Ext.115
> Fax: (734) 547-9964
> Email: chialun@mems-issys.com
> http://www.mems-issys.com/
>
>
> ------=_NextPart_000_00B4_01BE6AE0.FC91E170
> Content-Type: text/html;
> charset="iso-8859-1"
> Content-Transfer-Encoding: quoted-printable
>
>
> MEMS Discussion Group,
>
>
>   I am in search of a prototype manufacturing = source for=20 drilling
> micro-vias on glass wafers.  Laser=20 drilling or sand blasting seems like
> good candidates.  I need holes = of=20 diameter of about 150 micrometers
on a
> 7740 glass wafer.  Any help = would be=20 greatly appreciated.
>
>
> Chia-Lun Tsai, = Ph.D.
>   =20 Research Scientist
>    Integrated Sensing Systems,=20 Inc.
>    387 Airport Industrial Dr.
>    = Ypsilanti, MI=20 48198
>    Phone: (734) 547-9896, Ext.115
>    = Fax: (734)=20 547-9964
>    Email: <3d.htm>chialun@mems-issys.com
> &nbs=
> p; =20 <3d.htm>http://www.mems-issys.com/
>
>
>
> ------=_NextPart_000_00B4_01BE6AE0.FC91E170--
>