Hi
Yu could try it by ANASYS  5.4version software.

> -----Original Message-----
> From: haliyo@robot.uvsq.fr [SMTP:haliyo@robot.uvsq.fr]
> Sent: Monday, March 08, 1999 10:08 PM
> To:   MEMS@ISI.EDU
> Subject:      micro-manipulator with flexible beam
>
> Hi mems community !
>
> I'm working on the design of a micro-manipulator using adhesion forces
> with a gold coated monocrystal silicon cantilever (600x140x10 microns),
> attached to a piezzo accelerator on one end and free on the other. We've
> got problems on describing with precision the dynamic behavior of the beam
> (elastic, of course). We are currently trying somr finite elements
> software (abaqus) but they are  not friendly on dynamic. Any information
> or referance will be welcome... Thanx
>
> Sinan HALIYO
> LABORATOIRE DE ROBOTIQUE DE PARIS - Universite Paris 6
> haliyo@robot.uvsq.fr
> (33) 1 39 25 49 74
>
>