The 111 planes are the slow etch planes:  it will not etch fast.
If you start with an unpolished wafer you will see a field of nice triangles,
reflecting the crystal symmetry.





At 10:45 AM 3/8/99 -0600, you wrote:
>If you have a Si wafer that is cut paraller to (111) plane.
>Has anyone done any etching on the wafer and can tell me
>what would be the ecth rate and the grove corner shapes under the mask after
>etching.
>
>
>
>I would apreaciate your response.
>
>email    javid@mecad.uta.edu
>Fax      (817) 272-5010
>
>