A complete analysis of polysilicon piezoresitive coefficients is given in
David W. Burns Ph.D. thesis from the University of Wisconsin, 1988.

Regards,
David DeRoo
MicroSensors,Inc.

-----Original Message-----
From: fabounp@yahoo.com [mailto:fabounp@yahoo.com]
Sent: Wednesday, March 10, 1999 8:50 AM
To: MEMS@ISI.EDU
Subject: Polysilicon - piezoresistive coefficients


I'm looking for the transverse and the longitudinal piezoresistive
coefficients in the case using polysilicon thin film .... Thanks ...




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