Subject: Message text Sender: Jung_Alan/TECH_SEMIMV@semi.org June 13, 1995 SEMI would like you assistance in annoucing the following MEMS program next month in-conjunction with SEMICON/West 95 (July 11-13) at the Moscone Center, San Francisco, CA, USA. Thanks and Kind Regards, alan jung email: ajung@semi.org PROGRAM ANNOUCEMENT SEMICON/West sponsored by Semiconductor Equipment and Materials Interantional (SEMI) is the largest semiconductor equipment and materials trade show in North Amercia. The event is scheduled for July 11-13, 1995 at the Moscone Center, San Francisco, CA. Micro-Electromechanical Systems (MEMS) Course Event # MEMS795 Monday, July 10 8:30 am - 6:00 pm Registration opens at 7:30 am Moscone Center Recent progress in microactuators is transforming the conventional field of solid-state transducers (or sensors and actuators) into what is becoming known as MEMS. In the most general form, MEMS consist of mechanical microstructures, microsensors, microactuators, and electronics integrated in the same environment (e.g., on a silicon substrate). Miniaturization of mechanical systems promises unique opportunities for new directions of scientific and technological progress. MEMS are not only about miniaturization of mechanical systems; they are also a new paradigm for designing mechanical devices and systems. The microfabrication technology enables fabrication of large arrays of devices, which individually may perform simple tasks, but in combination can accomplish complicated functions. The field of MEMS is application driven and technology limited. While MEMS uses ICmaterials, fabrication processes and equipment, it can benefit tremendously from materials,processes, and equipment optimized for MEMS manufacturing. This course provides anintroduction to MEMS with emphasis on the role that semiconductor materials and equipmentsuppliers can play to further advance MEMS technology. Who Should Attend: Executive management, sales/marketing personnel, design, manufacturing, R&D and process engineers; supplier of equipment and materials - especially those with an interest in MEMS technology. Agenda: 8:30 Overview of MEMS market 9:30 Introduction to MEMS 10:30 Break 11:00 Device and Applications 12:00 Lunch with guest speaker: Dr. Richard Payne, Analog Devices 1:30 Materials and Processes 3:30 Break 4:00 Testing and Modeling 6:00 Wrap-up About the Instructor: Dr. Mehran Mehregany is an associate professor in the Department of Electrical Engineering and Applied Physics at Case Western Reserve University. Prior to that, he was a consultant to the Robotic Systems Research Department at AT&T Bell Laboratories, where he pioneered research in silicon micromechanical devices. He received his B.S. in Electrical Engineering from the University of Missouri in 1984 and his S.M. and Ph.D. in Electrical Engineering from M.I.T. in 1986 and 1990, respectively. Registration Fee: Before June 19 $295 Member $350 Non-member On-Site $395 Member $450 Non-member Registration Fee Includes: Program materials, lunch and breaks SEMICON/West 95 Show Hours (Moscone Center, San Francisco, CA): Tuesday, July 11, 9:30 am - 5:30 pm Wednesday, July 12, 10:00 am - 5:30 pm Thursday, July 13, 10:00 am - 4:00 pm Don't forget about the Silver Gala featuring Debbie Reynolds, the SEMICON/West Golf Tournament, and various other exciting activities. For more information on the programs and activities at SEMICON/West 1995 call SEMI Registrations at 415.940.6901, or phone our new faxback number for a registration form at 415.598.4369.