Hi:

Check the paper by T.W. Lee on Silicon Etching, he has some details on
this issue. Also he has complied all the etch recipes for Silicon in
this paper.

Jayant
*****************************************
Jayant Neogi
Vice President & Chief Technical Officer
Ph#  503-640-0586
Fax  503-640-8117
http://www.norsam.com
*****************************************
Kavita Chandra wrote:
>
> Does anybody has any information on a
> software that simulates KOH/EDP etch of
> silicon..(basically to get information
> on issues like corner compensation,
> under-cut).
>
> Thanks,
>
> Kavita Chandra
>

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