Hi,

I remenber that there is a paper about the simulation in actuator and
sensor. You can check it

-----Original Message-----
From: Kavita Chandra [mailto:kchandra@wilcoxon.com]
Sent: Thursday, April 15, 1999 1:44 AM
To: MEMS@ISI.EDU
Subject: Simulation of KOH etch



Does anybody has any information on a
software that simulates KOH/EDP etch of
silicon..(basically to get information
on issues like corner compensation,
under-cut).

Thanks,

Kavita Chandra