> Does anybody has any information on a software that simulates KOH/EDP etch of > silicon..(basically to get information on issues like corner compensation, > under-cut).> > Thanks, Kavita Chandra Hi, I can recommend you our simulation tool SIMODE/QSIMODE to simulate the KOH/EDP etching. There are standard etch rates for KOH and EDP available (EDP only on request). For a mixture of both, it is possible to produce a special etch rate file for your etch conditions. For more information please see http://www.gemac-chemnitz.de/mst/mst_eng.htm With kind regards Dirk Zielke Dirk Zielke GEMAC mbH Matthesstrasse 53 09113 Chemnitz Germany Tel.: +49 371 3377 131 Fax.: +49 371 3377 272 email: info@gemac-chemnitz.de http://www.gemac-chemnitz.de (Deutsch) http://www.gemac-chemnitz.de/mst/mst_eng.htm (English)