Hi - There is one called ACES (Anisotropic Crystalline Etch Simulator....I think). You can get beta copies off the web just do a search for Aces... Mike Rosa. At 10:44 AM 4/14/99 PDT, you wrote: > >Does anybody has any information on a >software that simulates KOH/EDP etch of >silicon..(basically to get information >on issues like corner compensation, >under-cut). > >Thanks, > >Kavita Chandra > > > Electronic Materials Laboratory. Xerox PARC 3333 Coyote Hill Rd, Palo Alto. USA. 94304. Ph : (650) 812-4162. Fax : (650) 812-4140.