The commercially available Aluminum Etch (phosphoric acid based) works well
for patterning nickel.
-----Original Message-----
From: Liu Weiguo (Dr) 
To: MEMS@ISI.EDU 
Date: Sunday, April 18, 1999 11:26 PM
Subject: electrochemical method for Pt etching


>Hi, All
>
>I would like to know how to etch Pt layer (on Si/SiO2/Ti, thickness 150nm)
>with electrochemical method. As I know, there is a reference published on
>"j. electrochem. soc., v123(1976), p703". But I can not get it here.
>And also I want to know how to etch the Ni layer(thickness 15nm) with wet
>chemical etchant which is safe to photoresist.
>
>Any help is greatly appreciated.
>
>Liu Weiguo
>School of EEE
>NTU, Singapore
>