Hi:

We have been using Iodine gas to etch into Pt and it works great.

Jayant
*************************************************
Jayant Neogi
Vice President & Chief Technical Officer
Norsam Technologies Inc.
Ph# (503) 640-0586
Fax  (503) 640-8117
http://www.norsam.com
*************************************************
-----Original Message-----
From: Emmanuel Dubois 
To: MEMS@ISI.EDU 
Date: Wednesday, April 21, 1999 11:27 AM
Subject: dry etch Pt


>
>Does anybody know which gas is suitable for dry etching platinum ?
>
>Thanks
>
>Emmanuel Dubois
>
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