>Subject: Isotropic Si etching with high etching rate
>
>I am searching for a etchant for high rate isotropic
>Si etching.
>I want to thin a 200 micron wafer to 100 micron.

Try HNA.  About 40% HNO3, 10% Water and 60% HF.
                                                        Justin.

Justin Mansell  |       "Only a risk tests the reality of a belief"
Ginzton Laboratory      |                       - C. S. Lewis
445 Via Palou St.       |
Stanford, CA 94305      |