Hello Colleagues:

I am looking for a photoresist to pattern silicon nitride thin film.
Specifically I wanted to use KMER resist as it goes well with dilute
NaOH solution which I am planning to use as an etchant for silicon
nitride. If someone can give me some information where to get this KMER
resist from, I will appreciate that very much.

Alternatively If someone can suggest
(1) some other photoresist that goes well with dilute solution of NaOH
or
(2) some other etchant for silicon nitride (other then anything that
contains HF)

I will be very thankful.

My e-mail address is "ricky_25@yahoo.com"

Thanks in advance

Vikas Galhotra

Research Scientist
TiNi Alloy Company


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