We are going to be using a reasonable amount of PMMA (to be used as an
e-beam and DUV resist). We are aware of the handling problems with PMMA
and was wondering if anyone had any suggestions on how to construct a
proper handling facility for PMMA spinning and developing. What have
people built and is there commerical equipment available ?

  Any suggestions are appreciated,

    Ken Westra
    Manager/Staff Scientist
    MicroFab at the Univerisity of Alberta