Get the standard chrome etch from Transene.  It will do tens of
Angstroms per second, depending on temperature.

Thor Osborn

-----Original Message-----
From: David Menche [mailto:dmenche@lightwavemicro.com]
Sent: Monday, May 10, 1999 11:35 AM
To: MEMS@ISI.EDU
Subject: Chrome etch



  We are using chrome as a hard mask to dry etch SiO2.
What is a good chrome echant that will not attack the photo resist, nor
SiO2, and what kind of etch rate is expected.   tried potassium
permaginate/potassium hudroxide solution, and find it is very slow at
chrome etch, and fast at dissolving the resist.

thanks    dave menche