There are plenty of commerical chrome etches available. They are used for wet
etching the chrome in photolithography mask production !
I am pretty sure these are all orthphosphoric based.

Any major semiconductor chemical vendor should be able to help you with a
sample.


Cheers


Conor.

-----Original Message-----
From:   PC :dmenche@lightwavemicro.com [SMTP:PC :dmenche@lightwavemicro.com]
Sent:   13 May 1999 00:01
To:     MEMS@ISI.EDU
Subject:        Chrome etch


  We are using chrome as a hard mask to dry etch SiO2.
What is a good chrome echant that will not attack the photo resist, nor
SiO2, and what kind of etch rate is expected.   tried potassium
permaginate/potassium hudroxide solution, and find it is very slow at
chrome etch, and fast at dissolving the resist.

thanks    dave menche