To MEMS colleagues:
This message is a summary of the replies regarding to my post
about free mask design software. I would like to express my
appreciation to those who shared their information with me
and hope this information could be used by more people in this
MEMS group.
Thanks,
--
Weihai Fu, Ph.D.
Research Engineer
Microelectronics Laboratory
Old Dominion University
Norfolk, Viginia 23529
Tel: (757)683-3312
Fax: (757)683-3220
-------------------------
Go to
http://www.mrc.uidaho.edu/vlsi/cad_free.html
Follow the freeware/shareware links to LASI.
I highly recommend LASI - I've been using it for 5 years now - the new
windows version is very nice....
You can also email to:
lasicad@aol.com
--
Tom Rust
Nanochip Inc
Box 13249
Oakland, CA 94661
(510) 339-6263
(510) 339-9636 FAX
http://www.nanochip.com
---------------------------------
There's a program called Magic which output's GDSII or CIF files.
http://www.research.digital.com/wrl/projects/magic/magic.html
Beverley Eyre
-----------------
Beverley Eyre
Tel: 510-486-4900
WWW: www.ee.ucla.edu/~eyre
---------------------------------------
Contact Jake Baker, jbaker@uidaho.edu
He will have a link to the Author, David Boyce.
Don Thelen Ph.D.
Analog Interfaces (www.analog-interfaces.com)
(406) 582-8512
fax (406) 582-8717
--------------------------------
Hi,
What type of output are you looking for?
If you are interested in masks for bulk etched shapes, you can try our
SEGS On-Line Etch Simulator (www.micron.me.tuns.ca -> SEGS).
It allows you to do bulk etch simulation (in theory, if you have the
etch rate diagram, you can simulate any etching, we have common
bulk etchants on-line but there is an option for entering your own.).
The output can be obtained via:
Postscript
PDF
mask (i.e. the xyz cordinates of vertices for the shapes you have
drawn).
The software is free to use and comments would be appreciated.
James
-----------------------------------
Weihai,
I don't know of any free software but I would be amazed if your
university doesn't have an AutoCAD package available for you. Most mask
makers will take DXF format. (Check with them first, of course.)
Sincerely,
Mike Mattes
Medtronic, Inc.
---------------------------------
Sure do. You can get the latest version at the web site:
http://cmosedu.com/cmos1/winlasi/winlasi.htm
Its an older DOS based program but it works very well for free.
Enjoy,
George
-------------------------------
Weihai,
check out
http://www.engboi.uidaho.edu/lan-group/jbaker/wwwbook/winlasi/winlasi.htm
i tried it but didn't get it...i used autoacad to make my masks...but
then
again they are for waveguides, not ics.
good luck,
dg
-------------------------------
Dear Weihai Fu,
I used the Magic software to design the different layouts of an
integrated
circuit. It allow you to draw the mask and also chexks the design rules
and everything. You can find the software in the following address:
http://www.research.digital.com/wrl/projects/magic/magic.html
Hope it will be useful for you.
Sonia.
------
Sonia Garcia Blanco
Department of EE
University of Glasgow
----------------------------------
Information on LASI can be found at:
http://cmosedu.com/cmos1/winlasi/winlasi.htm
Other free layout software may be found at:
http://www.mrc.uidaho.edu/vlsi/
Furthermore, WieWeb software (http://www.wieweb.com) provide a
low cost layout editor. They have a demo version that can be
used for simple masks (up to 4 layers). You have to e-mail them to get
this demo, the standard downloadable demo cannot save to file.
Best regards,
Remco.
-------------------------------
Hi,
For LASI, check it out at
http://cmosedu.com/cmos1/winlasi/winlasi.htm
Regards,
Nimit Chomnawang
nimit@ee.lsu.edu
---------------------------------
Dear Dr. Fu:
I read your recent posting to mems.isi.edu regarding a mask layout
editor.
IntelliSense produces a MEMS CAD tool, IntelliSuite, which includes a
mask
layout editor as well as other design and analysis modules.
We have an extensive University Program, through which we establish
partnerships with universities throughout the world. Through this
program,
universities receive the full commercial software package (and all
associated benefits) at a substantial discount.
IntelliSuite is also the only fully functional stand-alone MEMS
device/package-level simulation software available on both Windows NT
and
UNIX platforms. The IntelliSuite system is used throughout the world by
commercial, academic, government and research institutions.
I would be happy to discuss our University Partnership Program with
you. I
look forward to hearing from you.
Sincerely,
Nora Finch
Application Engineer
IntelliSense Corporation
36 Jonspin Road
Wilmington, MA 01887 U.S.A.
Phone: (978) 988-8000
Fax: (978) 988-8001
nfinch@intellisense.com
www.intellisense.com
-----------------------------
Hello,
I used LASI exclusively while I was still in college and found it to be
a
great program. The link to it on the internet is
http://cmosedu.com/cmos1/winlasi/winlasi.htm
Enjoy!
Michael R. Whitley
MEMS Optical, LLC
Process Engineer
Tel: 256-859-1886 Fax: 256-859-5890
Email: michael@memsoptical.com
Web: www.memsoptical.com
-------------------------------
Hello,
Try this URL:
http://members.aol.com/lasicad/index.htm
regards
Sergueï Jourba
_________________________________
LEOM - Ecole Centrale de Lyon
36 av. Guy de Collongue
BP 163, 69131 Ecully Cedex
Tel.: +33 (0)4-72-18-60-86
Fax: +33 (0)4-78-43-35-93
_________________________________