durusmail: mems-talk: Polysilicon as an electrical contact
Polysilicon as an electrical contact
2000-02-16
Polysilicon as an electrical contact
pu su
2000-02-16
Hello all,
I am currently a graduate student at Boston
University, and was wondering if anyone has tried to
use polysilicon as an electical contact.  Any
information regarding resistances achieved or problems
found with the contact surfaces would be greatly
appreciated.  Thanks.
SNT

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