> hi
> i am trying to etch a free standing pyramid of 100x100 microns at
> the base and atleast 40 microns tall using KOH/IPA. does anyone know
> a corner compensation structure which will result in the pyramid.
> thanks bharath

Hi,
from my point of view, it is only possible to get pyramides with
sharp side-edges using KOH/IPA,  if you use a rotated square as mask.
The rotation angle is between 30 and 45 degree and is up from your
etchant and temperature.
 have simulated it with SIMODE for KOH37%/IPA 70°C and get an angle
of 30° degree.

Hope my comments are helpful.

With kind regards
Dirk Zielke




Dirk Zielke
GEMAC mbH
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09116 Chemnitz
Germany
Tel.: +49 371 3377 131
Fax.: +49 371 3377 272
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