Behraad,
        If your thesis is to make a XeF2 etching system, I would understand,
otherwise check out Xactix (http://www.xactix.com).   Xactix makes the
patented Xetch system, which we currently have at Carnegie Mellon
University.   The system is versatile, safe, and etches silicon at
astounding rates.
                George


> -----Original Message-----
> From: Behraad Bahreyni [mailto:bahreyni@ee.umanitoba.ca]
> Sent: Tuesday, March 21, 2000 7:02 PM
> To: MEMS@ISI.EDU
> Subject: XeF2
>
>
>
> Dear colleagues:
>
>   I want to set up a XeF2 etching system (in its gaseous form not
> as a plasma) for etching Silicon,
>  but I wonder whether it reacts with the oil (used in vacuum
> pump) or not (I'm worried about the
>  formation of HF which can affect the future use of the chamber and pump)
>   I also want to know what kind of valves I should use as the
> vacuums valve and what is the best
>  material for the chamber itself.
>   Can anybody help me with these questions?
>
>   Thanks in advance,
>   Behraad Bahreyni
>
>
>
>