Zhang,
The most significant problem I've seen is with mounting of the bars on a
substrate.  Most often they are not mounted flat or at the same height relative
to each other, thus when you try coating them you will get large changes in
thickness across the bar and from bar to bar.  The depth and space between the
bars will also have a significant impact on the overall uniformity of the bar
coating.  Spin coating with the Karl Suss Gyrset system has provided some
benifit in coating but it will still be affected by the manner in which the bars
are mounted.

Clif

>>> Zhang Mingsheng  03/30 2:18 AM >>>
Dear all:

Can anyone provide me with information about coating uniform photoresist
on row bar(narrow rectangle)?

Zhang M.S.
Data storage Institute
Singapore