Are there publications or other availible information regarding the
decrease in volume of SU-8 upon crosslinking?  I am most interested to
know how much shrinking or contraction one can expect from expousre to
after postbake.  Is the reduction in resist volume appreciable (i.e.
distinct deviations from expected structure hiegth or trench spacing)
with layers intially 100s of um thick?

Thanks for any help.

--

Andy Armstrong
The Ohio State University
Dept. of Electrical Engineering