Hi all,
I want to thank everyone who has responded to my mail asking for
suppliers. A summary of all these suggestions I got is given below.
Karl Kuehl0100,0100,0100Tim=
es New Roman
( incomplete ! ) List of LPCVD nitride suppliers :
1) From: Jaime Poris <
Subject: Re: LPCVD-nitride supplier needed
...try polishing corporation of america (PCA) in santa clara, california
Jaime
2) From: Justin Mansell <
Try UHV in San Jose, CA 408 298 9255
Justin Mansell |
Ginzton Laboratory |
445 Via Palou St. |
Stanford, CA 94305 | (650) 723-2666 (fax) (650) 725-2284
(office)
3) From: Cyndi Zuniga <
We are Silicon Valley Microelectronics, Inc located i San Jose,
California, and we have been providing silicon
wafers to your insititute in the past.We can also assist you with this
service.
Cyndi Zuniga
European Sales Manager
Silicon Valley Microelectronics, Inc.
Telephone: 408-437-8505
Fax: 408-436-8402
"http://www.svmi.com/" eudora=3D"autourl"www.svmi.com
4) From: "Levy, Roland" <
We have capabilities for processing 4"-6" wafers here and can help =
you with LPCVD of Si3N4 and other processes....
Roland Levy
Phone (973) 596-3561
Fax: (973) 596-8369
outFrom : "Jon Bernstein" { HYPERLINK "mailto=
:jbernstein@draper.com" }0000,0000,FF00jb=
ernstein@draper.com0100,0100,0100
leftAsk CVD Systems, Inc. in the US 619-792-=
1690
6) From: "v.spiering@microproducts.nl"
<
Organization: Twente MicroProducts
We deposit low stress LPCVD in custom thicknesses. More information
about TMP is found at: http:/www.microproducts.nl
Vincent Spiering
Dr. Ir. V. Spiering, vice president marketing
TMP B.V.
P.O. Box 318
7500 AH Enschede
The Netherlands
phone: +31 53 4800111, fax: +31 53 4800119
{ HYPERLINK http://www.microproducts.nl }=
0000,0000,FF00http://www.microproducts.nl0100,0100,0100
7) From: rcarline@dera.gov.uk
I am commercial projects manager of the microsystems and
microengineering group at DERA in Malvern in the U.K.
We deposit LPCVD and PECVD (low stress) nitrides on 4 inch
wafers as standard in our silicon processing laboratory including the
development of low stress material.
Dr Roger Carline
8) From: Sylvain Jeanneret <
We make LPCVD nitride deposition on silicon wafers, but on 4"
wafers only, ...
Sylvain Jeanneret Phone: +41 32 7205 121
Institute of Microtechnology Direct:+41 32 7205 850
University of Neuchatel Fax: +41 32 7205 711
Rue Jaquet-Droz 1 E-mail:mailto:Sylvain.Jeanneret@imt.unine.ch
2007 Neuchatel Internet: HTTP://www-samlab.unine.ch
Switzerland
9) From: stein-ivar.hansen@sensonor.no
...What stress level of nitride are you looking for and what are the
quantities/intervals? We supply low-stress nitride (around 250-400 MPa),
mainly on our own supply of 4"Si wafers, but can discuss layers on
preprocessed wafers in some cases.
Stein Ivar Hansen
Dr. Stein Ivar Hansen +47 33 03 51 95 ( Direct )
Vice President Foundry Services +47 33 03 50 00
+47 913 921 36 (Mobile)
SensoNor asa
P.O Box 196 +47 33 03 51 05 ( Fax )
N-3192 Horten
NORWAY e-mail: Stein-Ivar.Hansen@sensonor.no
http://www.sensonor.com
10) From: jkoblitz@sensor.imsas.uni-bremen.de
...wir k=F6nnten Ihnen einen solchen Prozess-Service anbieten, jedoch=
zurZeit lediglich auf 100 mm Wafern (150 mm Wafer ab Ende 2000).
Wenn Sie Standard-Nitrid (Stress ca. 1 GPa) w=FCnschen, so liegt das
Limit in der Dicke bei 150 nm. Ein spezielles "low-stress" Nitrid (ca.
300 MPa) ist jedoch in gr=F6sseren Dicken bis 500 nm verf=FCgbar.
(Tel. 0421-2208 276 oder 0173 214 9805)
J=F6rn Koblitz
microFAB Bremen GmbH
www.microfab.de (see for service details)
11) From: FhG-ISiT Itzehoe
windbracke@isit.fhg.de / zwicker@isit.fhg.de
Fraunhofer-Institute for
Microelectronic Circuits and Systems
IMS Muenchen
Hansastrasse 27 d
D-80686 Muenchen Germany
Phone : +49 89 54759 237
Fax : +49 89 54759 100
email : kuehl@imsm.fhg.de
Web: http://www.ift.fhg.de