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Subject: Re: KOH-etching with electrochemical etch-stop

Dear Karim,

recently you inquired in this mailing-list about commercially
available equipment for electrochemical etch-stop processes.

At our institute, we use a MEMS Potentiostat from a company called
AMMT GmbH in Frankenthal/Germany for several years now. It is a very nice
computer-controlled device with special features for the etch-stop:
detection of the passivation point, alarms in case of an error, etc.
The software stores all etch-stop data so that we can refer to it
later.

I think, now they also have other equipment like etch chucks and
electrodes. AMMT's web site is http://www.ammt.de.

Best regards,

J=F6rn Koblitz
IMSAS, University of Bremen
Kufsteiner Str.
D-28359 Bremen

To: MEMS@ISI.EDU
    MSTNET@Cardiff.ac.uk

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