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Olivier de Gabrielli - Coordinateur Scientifique
A. C. M. I.
Association Capteurs, Mesure et Instrumentation.
Centre Universitaire de Formation et de
Recherche d'Archamps
Immeuble "Le Salève"
F - 74166 ARCHAMPS - France
Tel: 33 (0)450 31 55 10 Fax: 33 (0)450 31 57 21
mailto:odegabrielli@c4i.fr
mailto:acmi@c4i.fr http://www.c4i.fr/welacmi/acmi.html
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Message-ID: <3912BD80.DEAD5AF1@c4i.fr>
Date: Fri, 05 May 2000 14:24:33 +0200
From: Olivier de Gabrielli
Organization: ACMI
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To: Robert Johnstone , mems-cc@ISI.EDU
Subject: Re: Double-Thickness Wafers
References: <10005042354.AA13384@k2.isi.edu>
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Dear Sir,
SILTRONIX is a supplier of Silicon wafers which is able to produce low volume
non standard wafers.
http://www.siltronix.com/
SILTRONIX sarl
F-74165 Archamps - France
phone : +33 450 436518
fax : +33 450 437740
mailto:plant@siltronix.com - SALES OFFICE : mailto:sales@siltronix.com
We have the same sort of problems : wafer bonding and thick wafers.
Can you send me a summary of the answers.
Best regards.
Robert Johnstone wrote:
> Hello All,
>
> I am hoping to do some bulk micromaching in silicon where the structures are
up to 450 micrometers deep. Given that the standard wafer thickness is 475
micrometers, this is going to be a problem, especially since some of the
structures will be trenches that will run the entire length of the wafer.
>
> Is anyone aware of a reasonably priced supply of double-thickness wafers?
Alternatively, has anyone had success with bonding two wafers together?
>
> I would appreciate any input in this matter.
>
> Robert Johnstone
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Olivier de Gabrielli - Coordinateur Scientifique
A. C. M. I.
Association Capteurs, Mesure et Instrumentation.
Centre Universitaire de Formation et de
Recherche d'Archamps
Immeuble "Le Salève"
F - 74166 ARCHAMPS - France
Tel: 33 (0)450 31 55 10 Fax: 33 (0)450 31 57 21
mailto:odegabrielli@c4i.fr
mailto:acmi@c4i.fr http://www.c4i.fr/welacmi/acmi.html
_________________________________________________________
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