Really,

        Check out www.eecs.umich.edu/mistic. We did this sort of thing
        back in 1994. There seem to be not much interest on this since.

                                                Carlos H. Mastrangelo
                                                University of Michigan

On Fri, 3 Dec 1999, Sungwook Cho wrote:

> Hi All,
>
> I have developed a new methodolgy for MEMS process planning. It is a method
which automatically
> generates fabrication sequences for surface micromachined structures with
three-dimensional
> geometrical description(geometry-based system).
>
> The new system decomposes a imported 3-D geometric object into three-
dimensional compatible geometry
> for one process cycle for MEMS (ex. deposition-masking-etching) and groups
them for optimal layer
> generation. Then, it generates fabrication order and mask data for each
layers.
>
> In that it generate process plan from whole 3D MEMS structure,
> this approach is a unique approach compared with most of existing CAD systems
> for MEMS (MEMCAD, MEMS Pro, Intellisense, etc.), I think.
>
> Though there are a few similar systems similar whose concepts are similar with
mine,
> they commonly handle only two-dimensional geometry data.
>
> In my opinion, this approach for MEMS process planning can be expected
> to breakthrough the limitations comming from the conventional process planning
> system of MEMS, because many complex structures and compound MEMS
> have been developed now.
>
> Moreover, In future, CAD systems for 'MEMS synthesis(ex. system-on-chip)'
> which starts from 3-D model will be develpoed. Thus, this new process planning
> system could play an important role in the whole system.
>
> What do you think about this new approach for the development
> of MEMS process planning system?
> Any opinions, advices, and information would be appreciated.
> I look forward to hearing from you soon.
>
> Thanks in advance.
>
>
> Sincerely,
> Sungwook Cho.
>
>
>