durusmail: mems-talk: Question about doses between different maskaligners
Question about doses between different maskaligners
Question about doses between different maskaligners
nicklas andersson
2000-07-10
Hello!

I have some questions about the comparison between the doses when using an
"Karl Suss" and when using an "Anvik HexScanTM 2050 SME" mask aligner. The
questions are if there exist some relation between these two maskaligners,
which makes it possible to calculate the dose (pulserepetiotion, etc) for
the "Anvik" from the dose for the "Karl Suss" aligner? I don't know if
anyone have done this before, but i would appreciate  some tips regarding
this topic (ie. webbpages, persons etc.).
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