I am in the market for a downstream plasma system to perform a MEMs
release
        on a 50 uM by 50 uM square structure. It will be resting on a 2.5 uM bed
of
        polyimide. Any recommendations as to what equipment to consider. I
prefer
        to acquire a unit on the secondary market. The footprint may also be a
consideration.
        Anyone have any experience with a YES CV100PZ system?

        TIA

        Pat Franklin
        Indigo Systems