durusmail: mems-talk: anodic bonding
anodic bonding
2000-08-02
anodic bonding
choong weng on
2000-08-02
Dear all,

  I am looking for advice and comments on how to carry
out multiple layer anodic bonding between silicon and
borosilicate glass wafers.

  Secondly, what are the methods I can use to drill
holes (in the order of 1mm dia) in borosilicate glass.
 Thank you very much.


CHOONG Weng On
National University of Singapore

=====

Best Regards,

CHOONG Weng On
MEMS-LAB (EA 02-09)
National University of Singapore
DID: +65 874-4567
Fax: +65 874-4509

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