What's the depth of the holes? Your PR thickness should be at least a half
of the depth of the hole. Try to spin a viscous PR.

Yahong

>From: SILLON Nicolas 
>Reply-To: SILLON Nicolas , mems-cc@ISI.EDU
>To: MEMS@ISI.EDU
>Subject: Photoresist deposit on KOH holes
>Date: Fri, 4 Aug 2000 08:39:27 +0200
>
>Hi,
>
>I need to deposit photoresist on a wafer with KOH holes. With standard
>methods I am not able to cover correctly the edges of the holes.
>Does anybody can help me?
>
>Thanks.
>
>Nicolas.
>
>
>
>

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