Hello,

I am trying to etch grooves with 200 micron depth on quartz wafer
(76 mm in diameter) using 48% HF and 40% NH4F at 60°C, I can't
get smoonth grooves after etching.Does any
one know how to solve this problem.
 Thank you in advance.

Diplom Phys.Luciana Scarioni
Physikalisch Technische Bundesanstalt
Braunschweig Germany
Labor 2.32