durusmail: mems-talk: Narrow Slot on Thin Film
Narrow Slot on Thin Film
2000-08-25
Narrow Slot on Thin Film
Jung-Hoon Lee
2000-08-25
Hi colleagues,

Is there a company that can provide an array of
thermal oxide windows, ~0.5 to 1 um thick,  dimensions
something like 20 um x 100 um, spaced as needed to make
the Si wafer (could be 250 um thick, for example)
mechanically stable?

One imagines this might be done by
a. growing thermal oxide top side to 0.5 to 1 micron
thickness
b. patterning back side
c. Bosch deep etching from back side to the oxide
etch stop

Thanks in advance.

Junghoon


reply