durusmail: mems-talk: Help: Leakage testing
Help: Leakage testing
Help: Leakage testing
gene_gan@am.exch.agilent.com
2000-08-30
Hi, there,

        I am looking for a method to test the leakaging rate of the hermetic
sealed micro-sensors. The device has a dimension of 1mm x .8mm x 0.5mm with
cavity about 0.1 mm^3. My questions are:
 1.  Is it possible to use He test to check the leakage rate and how to do
it?
 2. Are there any companies to provide this kind of service?

Your suggestion is higly appreciated!

Duke


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